Method and system for optical MEMS with flexible landing structures
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United States of America Patent
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Nov 20, 2012
Grant Date -
Sep 17, 2009
app pub date -
Feb 14, 2008
filing date -
Feb 14, 2008
priority date (Note) -
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Abstract
An optical deflection device for a display application includes a semiconductor substrate comprising an upper surface region defining an upper surface plane. The optical deflection device also includes one or more electrode devices provided overlying the upper surface region and a hinge device including a silicon material and coupled to the upper surface region at a predetermined height above the upper surface plane. The optical deflection device further comprises a plurality of landing pads including a silicon material and coupled to the upper surface region at the predetermined height from the upper surface plane and a mirror structure. The mirror structure includes a post portion coupled to the hinge device and a mirror plate portion coupled to the post portion.
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