Planar coil and method of making the same
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United States of America Patent
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Nov 13, 2012
Grant Date -
Apr 12, 2012
app pub date -
Oct 7, 2010
filing date -
Oct 7, 2010
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A method of making a planar coil is disclosed in the present invention. First, a substrate having a trench is provided. Then, a barrier and a seed layer are formed on the substrate in sequence. An isolative layer is used for guiding a conductive material to flow into a lower portion of the trench such that accumulation of the conductive material at opening of the trench is prevented before the lower portion of the trench is completely filled up, thereby avoiding gap formation in the trench.
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