Device for characterizing the electro-optical performance of a semiconductor component
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United States of America Patent
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Nov 13, 2012
Grant Date -
Oct 14, 2010
app pub date -
Mar 23, 2010
filing date -
Apr 8, 2009
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A device for characterizing the electro-optical performance of a semiconductor component includes a chamber containing a controlled atmosphere; a measuring head equipped with conductive probes for contacting the electrical interfaces of said component and connected to a data processing system in order to determine said electro-optical performance; and a staging fixture support to accommodate said component(s), the staging fixture being capable of being cooled and being moved in an upward and downward translational movement to bring the electrical interfaces of said component(s) into contact with the tip of the measuring probes of the measuring head. The staging fixture has bumps and the components are positioned in contact with these and the staging fixture accommodates, in the area of each of these bumps, two positioning grids which are capable of sliding relative to each other and cooperating with each other to define pockets suitable for accommodating the component(s) to be characterized.
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