Megasonic processing apparatus with frequency sweeping of thickness mode transducers
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United States of America Patent
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Nov 13, 2012
Grant Date -
Jan 21, 2010
app pub date -
Oct 2, 2009
filing date -
Nov 5, 2004
priority date (Note) -
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Abstract
A megasonic processing apparatus and method has one or more piezoelectric transducers operating in thickness mode at fundamental resonant frequencies of at least 300 KHz. A generator powers the transducers with a variable-frequency driving signal that varies or sweeps throughout a predetermined sweep frequency range. The generator repeatedly vanes or sweeps the frequency of the driving signal through a sweep frequency range that includes the resonant frequencies of all the transducers.
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