Methods for photolithographic synthesis of polymer arrays utilizing anti-reflective coatings
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United States of America Patent
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Nov 13, 2012
Grant Date -
Mar 22, 2012
app pub date -
Oct 14, 2011
filing date -
Apr 17, 1996
priority date (Note) -
Expired
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Abstract
The present invention provides novel processes for the large scale preparation of arrays of polymer sequences wherein each array includes a plurality of different, positionally distinct polymer sequences having known monomer sequences. The methods of the invention combine high throughput process steps with high resolution photolithographic techniques in the manufacture of polymer arrays.
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