Monolithic high aspect ratio nano-size scanning probe microscope (SPM) tip formed by nanowire growth
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United States of America Patent
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Nov 13, 2012
Grant Date -
Dec 17, 2009
app pub date -
Aug 5, 2009
filing date -
Mar 23, 2006
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Abstract
A scanning probe where the micromachined pyramid tip is extended by the growth of an epitaxial nanowire from the top portion of the tip is disclosed. A metallic particle, such as gold, may terminate the nanowire to realize an apertureless near-field optical microscope probe.
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