Scanning charged particle beams
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United States of America Patent
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Nov 6, 2012
Grant Date -
Nov 25, 2010
app pub date -
Dec 12, 2008
filing date -
Dec 17, 2007
priority date (Note) -
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Abstract
Methods are disclosed that include exposing, in direct succession, portions of a surface of a sample to a charged particle beam, the portions of the surface of the sample forming a row in a first direction, the charged particle beam having an average spot size f at the surface of the sample, each portion being spaced from its neighboring portions by a distance of at least d in the first direction, and a ratio d/f being 2 or more.
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