Specimen holder having alignment marks
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United States of America Patent
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Nov 6, 2012
Grant Date -
May 24, 2012
app pub date -
May 31, 2011
filing date -
Nov 24, 2010
priority date (Note) -
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Abstract
For the microscopy of an object or a specimen with a combination of optical microscopy and particle beam microscopy, an electrically conducting specimen carrier (1) is used which is configured for use in a particle beam microscope as well as in an optical microscope and has at least one alignment mark (2). The alignment mark is configured as a pass-through structure and is detectable from the top and from the bottom of the specimen carrier.
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