Cleaning system and cleaning method

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United States of America Patent

PATENT NO 8303797
APP PUB NO 20080110766A1
SERIAL NO

11763065

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Abstract

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A cleaning system includes: a sulfuric acid electrolytic portion configured to electrolyze a sulfuric acid solution to generate an oxidizing substance in an anode chamber, a concentrated sulfuric acid supply portion configured to supply a concentrated sulfuric acid solution to the anode chamber, and a cleaning treatment portion configured to carry out cleaning treatment of an object to be cleaned using an oxidizing solution comprising the oxidizing substance. The sulfuric acid electrolytic portion has an anode, a cathode, a diaphragm which is provided between the anode and the cathode, the anode chamber which is demarcated between the anode and the diaphragm and a cathode chamber which is demarcated between the cathode and the diaphragm.

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Patent Owner(s)

Patent OwnerAddress
DE NORA PERMELEC LTD2023-15 ENDO FUJISAWA-SHI KANAGAWA 2520816 ?2520816

International Classification(s)

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  • 2007 Application Filing Year
  • C25B Class
  • 240 Applications Filed
  • 120 Patents Issued To-Date
  • 50 % Issued To-Date
Click to zoom InYear of Issuance% of Matters IssuedCumulative IssuancesYearly Issuances200720082009201020112012201320142015201620170255075100

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Fukui, Hiroyuki Kanagawa-ken, JP 41 440
Hayamizu, Naoya Kanagawa-ken, JP 56 460
Kato, Masaaki Kanagawa-ken, JP 138 1740
Shibata, Yukihiro Kanagawa-ken, JP 114 1741

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Citation count rangeNumber of patents cited in rangeNumber of patents cited in various citation count ranges17102208722101 - 1011 - 2021 - 3031 - 4041 - 5071 - 8081 - 9005101520253035404550556065707580859095100105110

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