Process for producing a concentrated solution for a photoresist-stripping liquid having low water content
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United States of America Patent
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Oct 30, 2012
Grant Date -
Nov 25, 2010
app pub date -
Aug 27, 2009
filing date -
Dec 26, 2008
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Abstract
There is provided a process for producing a concentrated solution of quaternary ammonium hydroxide which is characterized in that quaternary ammonium hydroxide in a form of water-containing crystals or of an aqueous solution is mixed with a water-soluble organic solvent selected from the group consisting of glycol ether, glycol and triol and the resulting mixed solution is subjected to a thin-film distillation in vacuo so as to evaporate the low boiling material. In accordance with this process, a concentrated solution of quaternary ammonium hydroxide having low water content is able to be easily produced.
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