Storage container for liquid chlorosilane and closing lid therefor

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 8297304
APP PUB NO 20100038362A1
SERIAL NO

12462946

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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The storage container for a liquid chlorosilane of the present invention comprises, a tank which stores the liquid chlorosilane, a valve which is connected to the tank and to which an external pipe can be connected detachably, and a closing lid which seals the valve when the external pipe is detached from the valve. The valve comprises a housing and a valve body provided in the housing. The closing lid has a lid body having a sealing surface contacting the connecting surface of the connecting flange, a supply pipe which supplies an inert gas to a space between the closing lid and the valve body in the housing, a supply valve which opens or closes the supply pipe, a discharge pipe which discharges a gas in the space, and a discharge valve which opens or closes the discharge pipe.

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Patent Owner(s)

Patent OwnerAddress
HIGH-PURITY SILICON CORPORATION5 MITA-CHO YOKKAICHI-SHI MIE

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Ito, Takanori Ichinomiya, JP 92 819
Sasaki, Go Yokkaichi, JP 8 34

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