Moving a free-standing structure between high and low adhesion states
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United States of America Patent
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Oct 16, 2012
Grant Date -
Sep 23, 2010
app pub date -
Mar 17, 2009
filing date -
Mar 17, 2009
priority date (Note) -
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Abstract
Embodiments disclosed herein generally solve a stiction problem in switching devices by using a series of pulses of force which take the switch from being strongly adhered to a landing electrode to the point where it is only weakly adhered. Once in the low adhesion state, the switch can then be pulled away from contact with a lower force provided by either the spring constant of the switch and/or the electrostatic forces resulting from low voltages applied to nearby electrodes.
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