Laser processing apparatus and laser processing method as well as debris extraction mechanism and debris extraction method
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United States of America Patent
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Oct 16, 2012
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app pub date -
Sep 6, 2006
filing date -
Sep 8, 2005
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Abstract
A laser processing apparatus is provided. The laser processing apparatus removes and extracts debris generated by irradiating a transparent resin layer formed on a substrate with laser light during a patterning process, and includes a debris extraction module provided on the upper side of the substrate, wherein the debris extraction module sucks and extracts debris due to sublimation, thermal processing and composite action thereof generated from the transparent resin layer on the substrate irradiated with the laser light from the lower side thereof.
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