Stage apparatus assembling method

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 8286318
APP PUB NO 20100146762A1
SERIAL NO

12710759

Stats

ATTORNEY / AGENT: (SPONSORED)

Importance

Loading Importance Indicators... loading....

Abstract

See full text

An assembling method that is high in assembly accuracy and easily performed at the actual installation site is provided. In this method, the sub base plates on the sub mounting tables are aligned with respect to a main base plate on a main mounting table at a temporary installation site, and the state thereof is maintained. Then, the main mounting table and the sub mounting tables are separated from each other to be transferred to the actual installation site, and the positioning state is restored at the actual installation site. Since a positional alignment can be performed at the temporary installation site, the work required at the actual installation site can be reduced. Furthermore, since a fine adjustment can be performed at the actual installation site, the accuracy in the positional alignment can be improved.

Loading the Abstract Image... loading....

First Claim

See full text

Family

Loading Family data... loading....

Patent Owner(s)

Patent OwnerAddress
ULVAC INC2500 HAGISONO CHIGASAKI-SHI KANAGAWA 2538543 ?2538543

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Ito, Shinya Hidaka, JP 126 790
Minami, Hirofumi Chigasaki, JP 28 118
Takahashi, Makoto Hidaka, JP 401 4129
Tanaka, Yasuzo Chigasaki, JP 17 179
Yahagi, Mitsuru Chigasaki, JP 20 73
Yuyama, Junpei Chigasaki, JP 28 133

Cited Art Landscape

Load Citation

Patent Citation Ranking

Forward Cite Landscape

Load Citation