Vacuum transport device with movable guide rail
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United States of America Patent
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Oct 9, 2012
Grant Date -
Oct 4, 2007
app pub date -
Feb 21, 2007
filing date -
Mar 29, 2006
priority date (Note) -
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Abstract
The present invention concerns a device for transporting substrates through vacuum chambers, especially coating machines with a substrate carrier on or at which the substrates can be arranged, wherein the substrate carrier has at least one guide rail which extends along at least one side of the substrate carrier, and wherein the guide rail is kept spaced apart from the substrate carrier by one or just a few spaced bearings.
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