Metal-semiconductor intermixed regions
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United States of America Patent
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Oct 2, 2012
Grant Date -
Jul 26, 2012
app pub date -
Jan 24, 2011
filing date -
Jan 24, 2011
priority date (Note) -
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Abstract
In one exemplary embodiment, a program storage device readable by a machine, tangibly embodying a program of instructions executable by the machine for performing operations, said operations including: depositing a first layer having a first metal on a surface of a semiconductor structure, where depositing the first layer creates a first intermix region at an interface of the first layer and the semiconductor structure; removing a portion of the deposited first layer to expose the first intermix region; depositing a second layer having a second metal on the first intermix region, where depositing the second layer creates a second intermix region at an interface of the second layer and the first intermix region; removing a portion of the deposited second layer to expose the second intermix region; and performing at least one anneal on the semiconductor structure.
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