Nano imprinting method and apparatus
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United States of America Patent
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Oct 2, 2012
Grant Date -
Dec 31, 2009
app pub date -
Jun 23, 2009
filing date -
Jun 25, 2008
priority date (Note) -
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Abstract
The present invention relates to a nano imprint method and to a nano imprint apparatus comprising: a first imprint module, a second imprint module, a storage and a feeder module, wherein; the first imprint module is adapted to imprint a pattern into an intermediate polymer stamp from a template; a second imprint module is adapted to imprint a pattern into a substrate from the intermediate polymer stamp; robot feeder modules are adapted to move the template, intermediate polymer stamp and the substrate from and to storages.
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