Method of manufacturing optical element, and optical element
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United States of America Patent
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Sep 25, 2012
Grant Date -
Jun 23, 2011
app pub date -
Mar 5, 2010
filing date -
Dec 21, 2009
priority date (Note) -
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Abstract
A manufacturing method of an optical element is provided, the optical element comprising: a shield part formed by a light shielding film formed and patterned on a substrate; a light transmission part formed by partially exposing a surface of the substrate; and a phase shifter part formed by partially etching the surface of the substrate, the method comprising the steps of: preparing an optical element blank with the light shielding film and a first resist film laminated on the substrate in this order; and forming a first resist pattern by applying drawing and development to the first resist film, covering a formation scheduled area of the shield part, and demarcating the formation scheduled area of the phase shifter part.
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