Systems and methods for forming magnetic nanocomposite materials

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United States of America Patent

PATENT NO 8273407
APP PUB NO 20070178229A1
SERIAL NO

11668293

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Abstract

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A method of fabricating a film of magnetic nanocomposite particles including depositing isolated clusters of magnetic nanoparticles onto a substrate surface and coating the isolated clusters of magnetic nanoparticles with an insulator coating. The isolated clusters of magnetic nanoparticles have a dimension in the range between 1 and 300 nanometers and are separated from each other by a distance in the range between 1 and 50 nanometers. By employing PVD, ablation, and CVD techniques the range of useful film thicknesses is extended to 10-1000 nm, suitable for use in wafer based processing. The described methods for depositing the magnetic nanocomposite thin films are compatible with conventional IC wafer and Integrated Passive Device fabrication.

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Patent Owner(s)

Patent OwnerAddress
INFRAMAT CORPORATION74 BATTERSON PARK ROAD FARMINGTON CT 06032

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Bergendahl, Albert S Jericho, US 7 269
Castrucci, Paul C South Burlington, US 1 10
Fleming, Daniel J South Burlington, US 4 168
Xiao, Danny Tongsan Willington, US 1 6

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