Method for purification of silicon tetrachloride

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United States of America Patent

PATENT NO 8273316
APP PUB NO 20110142742A1
SERIAL NO

13059961

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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An object of the present invention is to provide a method for purification of silicon tetrachloride which solves the problems of separating and removing organic chlorosilanes by distillation or adsorption.

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Patent Owner(s)

Patent OwnerAddress
JNC CORPORATION2-1 OTEMACHI 2-CHOME CHIYODA-KU TOKYO 100-8105

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Hayashida, Satoshi Kumamoto, JP 8 23
Semoto, Harumichi Kumamoto, JP 1 1

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