Laser heated discharge plasma EUV source
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United States of America Patent
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Sep 18, 2012
Grant Date -
Aug 27, 2009
app pub date -
Nov 25, 2008
filing date -
Nov 29, 2007
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Abstract
A self-magnetically confined lithium plasma which also may have an applied axial magnetic field is irradiated at sub-critical density by a carbon dioxide laser to generate extreme ultraviolet photons at the wavelength of 13.5 nm with high efficiency, high power and small source size.
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