Table guided by aerostatic bearing elements for vacuum application
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United States of America Patent
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Sep 18, 2012
Grant Date -
Oct 15, 2009
app pub date -
Apr 10, 2009
filing date -
Apr 11, 2008
priority date (Note) -
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Abstract
A table for vacuum application which is guided by aerostatic bearing elements, having a fixedly mounted supporting structure and a tabletop which is displaceable in x-direction and y-direction with respect to the fixedly mounted supporting structure by means of slides. The slides are provided with the aerostatic bearing elements for guiding, these aerostatic bearing elements being connected to feed lines for supplying the gas required for the operation of the gas bearings and suction lines for removing this gas. The suction lines comprise at least one variable-length line arrangement having a first pipe member and a second pipe member which penetrate one inside the other without contacting, at least one sealing gap being provided between the pipe members.
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