Methods for mastering microstructures through a substrate using negative photoresist
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United States of America Patent
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Sep 11, 2012
Grant Date -
Mar 24, 2011
app pub date -
Dec 1, 2010
filing date -
Sep 11, 2003
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Abstract
Microstructures are fabricated by impinging a radiation beam, such as a laser beam, through a substrate that is transparent to the laser beam, into a negative photoresist layer on the substrate. The negative photoresist layer may be subsequently developed to provide a master for optical and/or mechanical microstructures. Related systems, microstructure products and microstructure masters also are disclosed.
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