Method for the production of a component, and component
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United States of America Patent
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Sep 4, 2012
Grant Date -
May 13, 2010
app pub date -
Mar 28, 2008
filing date -
Jun 29, 2007
priority date (Note) -
Expired
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Abstract
A method for producing a component, especially a micromechanical, micro-electro-mechanical or micro-opto-electro-mechanical component, as well as such a component which has an active structure that is embedded in a layer structure. Strip conductor bridges are formed by etching first and second depressions having a first and second, different etching depth into a covering layer of a first layer combination that additionally encompasses a substrate and an insulation layer. The deeper depression is used for insulating the strip conductor bridge while the shallower depression provides a moving space for the active structure with the moving space being bridged by the strip conductor bridge.
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