Polishing slurry for aluminum and aluminum alloys

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 8251777
APP PUB NO 20080200098A1
SERIAL NO

12069495

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Abstract

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The invention is directed to a method of polishing a surface of an object that includes aluminum. The method includes the step of contacting the surface of the object with a soft polishing pad and a polishing composition. The polishing composition includes abrasive particles, an agent that oxidizes aluminum, and a liquid carrier to polish the surface of the object. The polishing composition includes the abrasive particles suspended in the liquid carrier, and is applied at a pH above about 7.

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Patent Owner(s)

Patent OwnerAddress
CABOT MICROELECTRONICS CORPORATION870 NORTH COMMONS DRIVE AURORA IL 60504

International Classification(s)

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Brusic, Vlasta Geneva, US 23 414
Clark, John Montgomery, US 133 2075
Gilliland, Jeffrey Montgomery, US 7 61
Lesiak, Stanley Naperville, US 1 7
Moeggenborg, Kevin Naperville, US 18 224
Wilson, Susan Yorkville, US 22 293

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