Iterative feedback tuning in a scanning probe microscope

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United States of America Patent

PATENT NO 8250667
APP PUB NO 20110016592A1
SERIAL NO

12744587

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Abstract

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A method, system, device, and software for automatically determining PI feedback parameters in a scanning probe microscopy application setup using an iterative feedback tuning process.

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FEI COMPANY5350 NE DAWSON CREEK DRIVE HILLSBORO OR 97124-5793

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Altenburg, Simon J Kiel, DE 1 4
Bengtsson, Paul Floda, SE 3 6
Svensson, Krister Gothenburg, SE 7 24

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