Plasma insensitive height sensing
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United States of America Patent
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Aug 14, 2012
Grant Date -
Oct 9, 2008
app pub date -
Apr 6, 2007
filing date -
Apr 6, 2007
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Abstract
A method for determining a distance between a first piece and a second piece includes measuring, at the first or second piece, a first signal at a first frequency, and measuring, at the first or second piece, a second signal at a second frequency. The second frequency is different from the first frequency. The distance is determined based on the measured first and second signals.
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