MEMS micromirror and micromirror array
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United States of America Patent
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Aug 7, 2012
Grant Date -
Dec 2, 2010
app pub date -
May 28, 2010
filing date -
Jun 1, 2009
priority date (Note) -
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Abstract
A micro-electro-mechanical-system (MEMS) micromirror array has an array of micromirrors on a support structure. Each micromirror is pivotally attached to the support structure by a resilient structure. The resilient structure defines a pivot axis. There is an array of electrostatic actuators for pivotally driving the array of micromirrors about the pivot axis. Each electrostatic actuator comprises a first part carried by the support structure, and a second part carried by the corresponding micromirror. An electrostatic sink is mounted to the support structure that shields at least one micromirror from spurious electrostatic actuation.
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