Electrolytic process using cation permeable barrier
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United States of America Patent
Stats
-
Aug 7, 2012
Grant Date -
Oct 26, 2006
app pub date -
Apr 28, 2006
filing date -
Apr 13, 1999
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
Processes and systems for electrolytically processing a microfeature workpiece with a first processing fluid and an anode are described. Microfeature workpieces are electrolytically processed using a first processing fluid, an anode, a second processing fluid, and a cation permeable barrier layer. The cation permeable barrier layer separates the first processing fluid from the second processing fluid while allowing certain cationic species to transfer between the two fluids. The described processes produce deposits over repeated plating cycles that exhibit deposit properties (e.g., resistivity) within desired ranges.
First Claim
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