Sputtering target assembly and method of making same
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United States of America Patent
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Aug 7, 2012
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N/A
app pub date -
Sep 13, 2011
filing date -
Sep 12, 2006
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Abstract
A method for producing a sputtering target assembly bonded to a backing plate. The method includes bonding a target to a high strength backing plate and further creating a vacuum seal between the target and the backing plate using friction stir welding processes.
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