Method and apparatus for determining the layer thickness and the refractive index of a sample

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United States of America Patent

PATENT NO 8233158
APP PUB NO 20100290046A1
SERIAL NO

12777712

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Abstract

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The present invention relates to a method and an apparatus for determining the layer thickness and the refractive index of a sample.

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Patent Owner(s)

Patent OwnerAddress
LAYTEC AKTIENGESELLSCHAFTSEESENER STR 10-13 BERLIN 10709

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Zettler, Joerg-Thomas Berlin, DE 7 25
Zettler, Johannes K Berlin, DE 1 1

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