Microwave supplying apparatus and microwave plasma system
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United States of America Patent
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Jul 24, 2012
Grant Date -
Jun 30, 2011
app pub date -
Dec 24, 2009
filing date -
Dec 24, 2009
priority date (Note) -
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Abstract
The invention discloses a microwave supplying apparatus including a microwave generator, a first power divider, a second power divider, a first waveguide, and a second wave guide. The first waveguide is connected to the microwave generator and has a first output terminal and a second output terminal to divide a microwave generated by the microwave generator along a first direction. The second power divider is connected to the first output terminal and has a third output terminal and a fourth output terminal to divide the microwave along a second direction. The first waveguide and the second waveguide are connected to the third output terminal and the fourth terminal respectively and receive the microwave through the first power divider and the second power divider to respectively output the microwave fields with approximate intensity distributions.
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