Multiple current charged particle methods
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United States of America Patent
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Jul 24, 2012
Grant Date -
Jan 21, 2010
app pub date -
Jun 29, 2009
filing date -
Jul 15, 2008
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Abstract
Charged particle beams with different charged particle currents are disclosed. In some embodiments, a method includes exposing a sample to a first ion beam having a first ion current at the sample, and exposing the sample to a second ion beam having a second ion current at the sample, where the first ion current is at least two times greater than the second ion current. In certain embodiments, a method includes creating a first ion beam at a first pressure, exposing a sample to the first ion beam, creating a second ion beam at a second pressure, and exposing the sample to the second ion beam, where the first pressure is at least two times greater than the second pressure.
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