Methods and systems for measuring target movement with an interferometer
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
Jul 17, 2012
Issued Date -
N/A
app pub date -
Mar 16, 2009
filing date -
Mar 16, 2009
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
Systems and methods are disclosed for an interferometer system. An interferometer system may comprise a plurality of light sources, wherein each light source of the plurality is configured to transmit a source beam. The interferometer system may also include an interferometer including a polarizing beam splitter and a reference reflector. The interferometer is configured to receive the source beam and transmit a measurement beam to a target reflector and a reference beam to the reference reflector. Additionally, the interferometer system may include a plurality of receivers, wherein each receiver of the plurality is associated with a light source and configured to receive a mixed beam comprising a reflected measurement beam and a reflected reference beam. Moreover, the interferometer is configured to receive at least one source beam at an angle with respect to an axis perpendicular to a side of the interferometer configured to receive the source beam.
First Claim
Family
International Classification(s)
Cited Art Landscape
Patent Citation Ranking
Recipient Email Address
Recipient Email Address
Comment
Recipient Email Address
Add to Portfolio(s)
To add this patent to one, or more, of your portfolios, simply click the add button.
This Patent is in these Portfolios:
Add to additional portfolios:
Last Refreshed On:
Changes done successfully