Light-assisted testing of an optoelectronic module
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United States of America Patent
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Jul 17, 2012
Grant Date -
Jul 16, 2009
app pub date -
Apr 4, 2007
filing date -
Apr 4, 2006
priority date (Note) -
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Abstract
The present invention relates to a device for testing an optoelectronic module, comprising a first source for generating an electromagnetic beam or particle beam, a second source for illuminating the optoelectronic module; and a detector. In addition, a method for testing an optoelectronic module is provided comprising illuminating the optoelectronic module, directing an electromagnetic beam or particle beam and detecting defects in the optoelectronic module. The illumination additional to the electromagnetic beam or particle beam makes defects visible which otherwise would not be detected.
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