Method for the production of a ceramic substrate, and a ceramic substrate

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United States of America Patent

PATENT NO 8222171
APP PUB NO 20090305867A1
SERIAL NO

12373332

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Abstract

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A method for the production of a ceramic substrate for a semiconductor component, includes the steps of producing paper containing at least cellulose fibers, as well as a filler to be carbonized and/or SiC, pyrolizing the produced paper, and siliconizing the pyrolyzed paper.

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Patent Owner(s)

Patent OwnerAddress
SCHUNK KOHLENSTOFFTECHNIK GMBH35452 HEUCHELHEIM

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Ebert, Marco Wetter, DE 12 54
Henrich, Martin Wetzlar, DE 15 60
Lauer, Andreas Kirchhain, DE 10 29
Nauditt, Gotthard Huttenberg, DE 11 27
Scheibel, Thorsten Bad Nauheim, DE 13 57
Weiss, Roland Huttenberg, DE 35 128

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