Large area, homogeneous array fabrication including leveling with use of bright spots
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United States of America Patent
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Jul 3, 2012
Grant Date -
Sep 30, 2010
app pub date -
Jan 25, 2010
filing date -
Jan 26, 2009
priority date (Note) -
Expired
status (Latency Note)
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Abstract
Better leveling procedures for patterning at the small scale including the nanoscale. A method comprising: providing at least one array of cantilevers comprising tips thereon, wherein the cantilevers comprise at least one relatively bright spot, or at least two relatively bright spots, near the tip upon viewing, providing a substrate, leveling the array and the substrate with respect to each other, wherein the relatively bright spot near the tip is viewed to determine a contact of the tip and substrate.
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