Scanning probe microscope capable of measuring samples having overhang structure
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United States of America Patent
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Jun 26, 2012
Grant Date -
Jul 1, 2010
app pub date -
Feb 12, 2010
filing date -
Nov 17, 2006
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Abstract
A scanning probe microscope tilts the scanning direction of a z-scanner by a precise amount and with high repeatability using a movable assembly that rotates the scanning direction of the z-scanner with respect to the sample plane. The movable assembly is moved along a curved guide by a rack-and-pinion drive system and has grooves that engage with corresponding ceramic balls formed on a stationary frame to precisely position the movable assembly at predefined locations along the curved guide. The grooves are urged against the ceramic balls via a spring force and, prior to movement of the movable assembly, a pneumatic force is applied to overcome the spring force and disengage the grooves from the ceramic balls.
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