MEMS device including a chip carrier
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United States of America Patent
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Jun 19, 2012
Grant Date -
Oct 21, 2010
app pub date -
Jun 28, 2010
filing date -
Jun 5, 2006
priority date (Note) -
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Abstract
A MEMS device includes a chip carrier having an acoustic port extending from a first surface to a second surface of the chip carrier, a MEMS die disposed on the chip carrier to cover the acoustic port at the first surface of the chip carrier, and an enclosure bonded to the chip carrier and encapsulating the MEMS die.
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