Method for recovering a used slurry

United States of America Patent

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Jun 19, 2012
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Jul 1, 2010
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Aug 12, 2009
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Dec 26, 2008

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Abstract

Foreign substances which are not inherently contained in a polishing slurry are selectively separated and removed from a polishing slurry component comprised of abrasives, a solvent and an additive which are inherently contained in the polishing slurry.

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NOMURA MICRO SCIENCE CO LTD	JAPAN

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Inventor Name	Address	# of filed Patents	Total Citations
Abe, Mitsugu	Atsugi, JP	7	102
Iiyama, Masamitsu	Atsugi, JP	8	12

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Method for recovering a used slurry

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United States of America Patent

12539862

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PATENT NO	8202429
APP PUB NO	20100163487A1
SERIAL NO	12539862
DOCKET NO

US Family Size	Non-US Coverage
Patent Longevity	Forward Citations

DATE PUBLISHED	PUBLICATION/PATENT NO.	PUBLICATION TYPE
June 19, 2012	US,8202429,B2 US8202429B2	GRANTED PATENT AS SECOND PUBLICATION
July 01, 2010	US,20100163487,A1 US20100163487A1	FIRST PUBLISHED PATENT APPLICATION

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12539862

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