Method for the optical inspection and visualization of optical measuring values obtained from disk-like objects

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United States of America Patent

PATENT NO 8200003
APP PUB NO 20090052766A1
SERIAL NO

12228582

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Abstract

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The present invention relates to a method for optically inspecting and visualizing optical measuring values from at least one image of a disk-like object, including the steps of recording said at least one image of said at least one disk-like object, wherein a plurality of optical measuring values are produced from said at least one recorded image; generating a resulting image, wherein an area of the surface of said disk-like object having optical measuring values within a predetermined interval, is associated with a color or brightness value selected from a predetermined range; and varying at least one imaging parameter as a function of the detected and evaluated optical measuring values and/or as a function of a visual inspection of the resulting image by an operator.

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Patent Owner(s)

Patent OwnerAddress
VISTEC SEMICONDUCTOR SYSTEMS GMBH35781 WEILBURG

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Michelsson, Detlef Wetzlar-Naunheim, DE 17 105

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