Film resistor with a constant temperature coefficient and production of a film resistor of this type

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 8198978
APP PUB NO 20110102127A1
SERIAL NO

12736573

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Abstract

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The invention relates to a film resistor (1) comprising a carbon-containing material (3) into which clusters (4) of conductive cluster material are introduced, wherein the conductive cluster material has a positive temperature coefficient. The clusters (4) are surrounded by a graphite casing and embedded in the carbon-containing material (3). Furthermore, the cluster material is present in a thermodynamically stable phase. The invention also relates to a method for producing a film resistor (1), wherein a PVD process is carried out on a carrier substrate (11) using a sputtering material under a reactive atmosphere of a carbon-containing gas, and therefore the carbon-containing gas is dissociated and a carbon-containing layer (3) is deposited on the carrier substrate (11), with clusters (4) of the sputtering material being embedded in said carbon-containing layer, wherein the carbon-containing layer (3) is heated to a predetermined temperature while the PVD process is carried out, with the sputtering material or a compound of the sputtering material forming in a stable phase at said temperature.

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Patent Owner(s)

Patent OwnerAddress
HOCHSCHULE FÜR TECHNIK UND WIRTSCHAFT DES SAARLANDES66117 SAARBRÜCKEN
SIEGERT THINFILM TECHNOLOGY GMBH07629 HERMSDORF

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Brode, Wolfgang Hermsdorf, DE 6 59
Freitag-Weber, Olivia Schawlbach, DE 1 12
Göttel, Dirk Wallerfangen, DE 1 12
Koppert, Ralf Salzgitter, DE 1 12
Schultes, Günther Saarbrücken, DE 1 12
Werner, Ulf St. Ingbert, DE 1 12

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