Film resistor with a constant temperature coefficient and production of a film resistor of this type
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United States of America Patent
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Jun 12, 2012
Grant Date -
May 5, 2011
app pub date -
Apr 6, 2009
filing date -
Apr 24, 2008
priority date (Note) -
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Abstract
The invention relates to a film resistor (1) comprising a carbon-containing material (3) into which clusters (4) of conductive cluster material are introduced, wherein the conductive cluster material has a positive temperature coefficient. The clusters (4) are surrounded by a graphite casing and embedded in the carbon-containing material (3). Furthermore, the cluster material is present in a thermodynamically stable phase. The invention also relates to a method for producing a film resistor (1), wherein a PVD process is carried out on a carrier substrate (11) using a sputtering material under a reactive atmosphere of a carbon-containing gas, and therefore the carbon-containing gas is dissociated and a carbon-containing layer (3) is deposited on the carrier substrate (11), with clusters (4) of the sputtering material being embedded in said carbon-containing layer, wherein the carbon-containing layer (3) is heated to a predetermined temperature while the PVD process is carried out, with the sputtering material or a compound of the sputtering material forming in a stable phase at said temperature.

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- 15 United States
- 10 France
- 8 Japan
- 7 China
- 5 Korea
- 2 Other
Patent Owner(s)
Patent Owner | Address | |
---|---|---|
HOCHSCHULE FÜR TECHNIK UND WIRTSCHAFT DES SAARLANDES | 66117 SAARBRÜCKEN | |
SIEGERT THINFILM TECHNOLOGY GMBH | 07629 HERMSDORF |
International Classification(s)
Inventor(s)
Inventor Name | Address | # of filed Patents | Total Citations |
---|---|---|---|
Brode, Wolfgang | Hermsdorf, DE | 6 | 59 |
Freitag-Weber, Olivia | Schawlbach, DE | 1 | 12 |
Göttel, Dirk | Wallerfangen, DE | 1 | 12 |
Koppert, Ralf | Salzgitter, DE | 1 | 12 |
Schultes, Günther | Saarbrücken, DE | 1 | 12 |
Werner, Ulf | St. Ingbert, DE | 1 | 12 |
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Maintenance Fees
Fee | Large entity fee | small entity fee | micro entity fee | due date |
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Fee | Large entity fee | small entity fee | micro entity fee |
---|---|---|---|
Surcharge after expiration - Late payment is unavoidable | $700.00 | $350.00 | $175.00 |
Surcharge after expiration - Late payment is unintentional | $1,640.00 | $820.00 | $410.00 |
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