Getter pump and vacuum coating installation comprising a getter pump
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United States of America Patent
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Jun 12, 2012
Grant Date -
Aug 13, 2009
app pub date -
Jul 4, 2007
filing date -
Jul 5, 2006
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A highly efficient getter pump with low maintenance requirements is applied to a vacuum coating installation, allowing a substrate to be coated to remain uncontaminated by a dusting of getter material. The getter pump comprises a pump housing with an exposure opening. The housing has a getter body, of getter material that essentially closes the exposure opening and can move in relation to the exposure opening. An inner sub-section of the surface of the getter body points towards the interior of the pump housing and an outer sub-section points towards the exterior of the pump housing through the exposure opening. The positions of the inner and outer sub-sections are interchangeable by movement of the getter body. The getter pump is equipped with a device for removing getter material from the inner sub-section.
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