Arrangement for coating a substrate
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United States of America Patent
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Jun 5, 2012
Grant Date -
Jun 22, 2006
app pub date -
Oct 20, 2005
filing date -
Dec 17, 2004
priority date (Note) -
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status (Latency Note)
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Abstract
The invention relates to an arrangement for the coating of substrates, which comprises an evaporation source and a vapor barrier between the evaporation source and the substrate. The vapor barrier is maintained at a temperature which is at least equal to or above the vaporization temperature of the material to be vaporized. The vapor barrier is implemented as a quartz valve, which includes a spherical closure part connected with a movable rod. In a first position this spherical closure part closes a vapor conducting tube, which is connected with the evaporation source, and, in a second position, the spherical closure part abuts a spherical calotte which seals off a quartz tube.
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