Methods of processing a substrate using a flat surface air bearing assembly
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United States of America Patent
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Jun 5, 2012
Grant Date -
Aug 5, 2010
app pub date -
Apr 9, 2010
filing date -
Nov 17, 2006
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A method of processing a substrate, including supporting a substrate using an air bearing produced via an air bearing assembly, the air bearing assembly having: an upper portion having a plurality of air supply and vacuum holes therethrough; a lower portion; and a plurality of spacers disposed between and maintaining the upper and lower portions in spaced relation, wherein a density of the air supply and vacuum holes is high enough to provide an air bearing for a substrate, but low enough such that at least one of: (i) a sufficient number of the spacers are employed, and (ii) the spacers are located in close enough proximity, to maintain a substantially uniform flatness of the upper portion relative to the lower portion.
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