Polymer for resist and resist composition manufactured using the same

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May 29, 2012
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Apr 1, 2010
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Apr 2, 2009
filing date
Sep 30, 2008

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Disclosed are a polymer for a chemically amplified resist represented as

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KOREA KUMHO PETROCHEMICAL CO LTD	100 CHEONGGYECHEON-RO JUNG-GU SEOUL 04542

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Inventor Name	Address	# of filed Patents	Total Citations
Hong, Yonghwa	Cheonan-si, KR	4	4
Joo, Hyunsang	Daejeon, KR	5	10
Kim, Jinho	Daejeon, KR	374	3262
Lee, Changsoo	Seoul, KR	51	169

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Polymer for resist and resist composition manufactured using the same

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United States of America Patent

12416973

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PATENT NO	8187790
APP PUB NO	20100081079A1
SERIAL NO	12416973
DOCKET NO

US Family Size	Non-US Coverage
Patent Longevity Expired	Forward Citations

DATE PUBLISHED	PUBLICATION/PATENT NO.	PUBLICATION TYPE
May 29, 2012	US,8187790,B2 US8187790B2	GRANTED PATENT AS SECOND PUBLICATION
April 01, 2010	US,20100081079,A1 US20100081079A1	FIRST PUBLISHED PATENT APPLICATION

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12416973

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