Importance

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Abstract

The object of the present invention is to provide an apparatus for manufacturing a gas barrier plastic container which simultaneously satisfies the condition that the same vacuum chamber can be used even when the container shapes are different, the condition that a high-frequency power source is unnecessary, and the condition that film formation can be carried out for a plurality of containers inside one vacuum chamber in order to make the apparatus low cost. In an apparatus for forming a film on the inner surface of a container, a thermal catalyst is supported on a source gas supply pipe, and the source gas supply pipe is inserted into the port of the container, followed by film formation. In an apparatus for forming a film on the outer surface of a container, a thermal catalyst is arranged on the periphery of the plastic, and a source gas is blown out through the source gas supply pipe while bringing the source gas into contact with the thermal catalyst for film formation. Cooling is carried out to avoid the thermaldeformation of the container by heat radiated from the thermal catalyst. For example, a container on which a hydrogen-containing SiN_x thin film having a film thickness of 5 to 100 nm and a hydrogen content ratio of 1 to 10 atomic % has been obtained.

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First Claim