Cascade source and a method for controlling the cascade source
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United States of America Patent
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May 22, 2012
Grant Date -
Apr 7, 2011
app pub date -
Dec 14, 2010
filing date -
May 21, 2003
priority date (Note) -
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Abstract
A cascade source provided with a cathode housing, a number of cascade plates insulated from each other and stacked on top of each other which together bound at least one plasma channel, and an anode plate provided with an outflow opening connecting to the plasma channel, wherein one cathode is provided per plasma channel, which cathode comprises an electrode which is adjustable relative to the cathode housing in the direction of the plasma channel, wherein the clamping provision is preferably of the collet chuck type. Also described is method for controlling the cascade source in use.
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