Polymer for forming organic anti-reflective coating layer
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
May 15, 2012
Grant Date -
Oct 21, 2010
app pub date -
Jun 16, 2009
filing date -
Jun 16, 2008
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A polymer for forming an organic anti-reflective coating layer, which is soluble in alkali solutions so that an additional etching process of anti-reflective coating layer is not required, and a composition including the same are disclosed. The polymer for forming an organic anti-reflective coating layer has the following formula.
First Claim
Family
International Classification(s)
Cited Art Landscape
Patent Citation Ranking
Recipient Email Address
Recipient Email Address
Comment
Recipient Email Address
Add to Portfolio(s)
To add this patent to one, or more, of your portfolios, simply click the add button.
This Patent is in these Portfolios:
Add to additional portfolios:
Last Refreshed On:
Changes done successfully