Air bushing linear stage system
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United States of America Patent
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May 8, 2012
Grant Date -
Apr 22, 2010
app pub date -
Oct 22, 2009
filing date -
Oct 22, 2008
priority date (Note) -
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status (Latency Note)
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Abstract
A linear stage system is provided. The linear stage system includes a base, a carriage plate, a first shaft, a first air bushing coupled to the base, a first motor coupled to the base and the carriage plate, and a first position encoder. The first air bushing is configured to support the carriage plate via the first shaft, wherein the first air bushing utilizes the first shaft as a guide surface and is configured to support positioning of the carriage plate along an axis. The first motor is configured to create a linear motion parallel to the axis in a first motor element coupled to the carriage plate to position the carriage plate along the axis in response to a first control signal. The first position encoder is configured to determine a position of the carriage plate relative to the base.
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